Electrostatic chuck suction monitoring unit
By connecting between the electrostatic chuck and the control power supply, it is possible to continuously monitor the state of the electrostatic chuck and the object.
The "Adsorption Monitor Unit" from Creative Technology is a tool that allows for constant monitoring of the adsorption state between an electrostatic chuck and the target object by detecting capacitance. Without modifying the electrostatic chuck or power supply, it can be connected between the electrostatic chuck and the power supply, enabling the addition of sensor functionality to the electrostatic chuck. 【Features】 ■ Constant monitoring of the adsorption state of the target object ■ Detection of unexpected malfunctions ■ Easy installation *For more details, please refer to the PDF document or feel free to contact us.
- Company：クリエイティブテクノロジー
- Price：Other
